In the present work, plasma surface interaction for constant mean free path has been investigated by choosing a three-component electronegative warm plasma where electrons are described by non-extensive statistics, and both negative and positive ions by fluid approach. Here, the finite value of ion-neutral collisions, the temperature of negative and positive ions, the mass of […]
Plasma-material interaction has been a subject of interest for the past several decades due to its importance in various fields of research such as film deposition, surface nitriding, plasma etching, plasma reactors at low-pressure conditions etc. During this interaction, the presence of negative ions further plays a vital role to ease defect-free analysis of soft […]
